Light shapes the technical application in tiny machining

Foreword is tiny and mechanical (the hi-tech research domain that Micromachines) or MEMS(microelectromechanicalsystems) of system of personal computer cable are sex of the sex of a brim with 80 arisen time, across. From 20 centuries since 80 time, miniaturization, miniature changes a when become mechanical evolution main way, accordingly, small machine is labelled by the developed country such as the United States, Japan, Germany the key of 21 centuries develops course. Current, the application that basically is centered domestic and internationally in craft of design of tiny and mechanical theory, structure, imperceptible treatment and small machine to the research of small machine is discussed wait for a respect [2-3] . What tiny and mechanical production middling uses is semiconductor technology, semiconductor technology is existing: The part that can make basically is plane model, form three-dimensional and complex structure hard, realize spatial mechanism to make hard, cannot get used to the production requirement of the advanced small machine such as small robot; Installation cost is big; Odd, pre production cost is advanced problem. Accordingly, each national capital makes the new approach of three-dimensional and complex part in exploration. Shape quickly technology of RPM(rapidPrototyping ＆ Manufacturing) is a when development of 80 time later period rises fast design and processing technique [1] . The core idea of fast processing is planar entity decomposes 2 dimension, chase a treatment, accumulation, form prototype finally. The biggest advantage of this kind of production technology is can apace makes three-dimensional and complex part, just can make up for the inadequacy of silicon technology. In last few years, the country such as Japan already began those who undertake the technology regards the imperceptible treatment of small machine as craft will shaping quickly to discuss [4] , and about shaping solely the technical application in tiny machining studies, home has not seen research reports. The article reports what about shaping solely the technology uses at machining tiny and mechanical possibility to discuss conclusion, and shape solely to small machine the progress that following problems study the system [5] : (1) light shapes the special technology issue such as means of control of face of means of scanning of means, section means and data format, beam of light, fluid; (2) system is formed reach debug; (3) light shapes craft experiment. The possibility of 1 tiny and mechanical smooth processing reachs his special technology issue 1.

The tiny and mechanical definition that the article uses the possibility of smooth processing of 1 small machine is: Total size makes an appointment with L cubic metre centimeter the following, the part is the smallest length is controlled in 10 micron, structural height is compositive change, have intelligent pilot machine by the computer. Compare with common mechanical photograph, the characteristic that small machine is machining a respect is: Size is small, the treatment resolution with high demand (the between 2 o'clock the least space that can have machining independently) spend freely with big treatment (the complex degree) that can process spare parts form. Below the reduce such as the resolution of will commonly used imperceptible processing technique, main problem that can machine appearance and existence is expressed 1. With the watch a way of shown commonly used and imperceptible treatment is compared, the resolution that shapes as a result of light can amount to left and right sides of 2 μ M, and have treatment to spend big, spare parts to be able to wait for a characteristic for aleatoric and complex form freely, agree with the treatment of small machine. 1.

The special technology issue of 2 tiny and mechanical smooth processing (1) shapes one of resolution and solidify unit small machining main index is resolution. In shape quickly in making, we distinguish it reach for scanning resolution shape resolution. Shape resolution is to point to shape most subsection; Scanning resolution points to the least space with scanning mobile orgnaization. Shape in tiny mechanical light the concept of unit of fetching smooth solidify in the system: Smooth solidify unit is to show illuminate of stain of a laser is on photosensitive colophony the colophony bulk of place solidify, solidify unit is smaller, shape resolution is higher. (2) light shapes as general as means of scanning of beam of light of means of scanning of beam of light component scans for grating and vector scans two kinds. Vector sweeps a newspaper is the line shapes, shape scanning of grating of resolution low C is the dot shapes, make stimulate beam of light to undertake scanning by a group of parallel light, beam of light is pressed shut means control, will receive aleatoric three-dimensional form with this. Grating scanning law is controlled easily reach rise shape resolution, but make large shape the time of content will increase substantially. Shape to rise resolution, overcome the weakness with long sweep time, this system uses improvement grating scanning means, its characteristic is: Because grating scans,the handling time of type and scanning area become scale roughly, to shorten handling time, scanning method is pressed design to machining content interior to scan only; To eliminate the SACKRASH of the scanner. If graph L place is shown,adopt with means of directional grating scanning. Light shapes means still has solidify of face of film of attack by surprise to wait. The author shapes light means, characteristic and illuminant of place consumed chart if the watch is shown 2 times,induce. This research Lai uses the dot solidify light that answers relatively with smooth solidify unit to shape means, with ultraviolet laser is illuminant. (The RPM system with 3) section means and data average format uses STL data form: Undertake to CAD model first small the disperse reseau of model of face of 2 horn shape is changed approach, make the STL file of message of a series of as similar as former three-dimensional substance small triangle data, undertake to STL file section is handled again. As a result of small 2 horn form conveys actual curved surface completely impossibly, can arise cannot compensatory precision loss. In addition, local defect can appear when format of S fourth L is changed, some blemish relatively hard this system is opposite repair C directly CAD model has section statified, use BMP(bitmap: Bitmap) data format. Because be direct section, can avoid the approachs sum of errors to describe flaw generation of similar STL law; And BMP data format and solidify unit and grating scanning means are direct and corresponding, be helpful for raising solidify unit precision. (Control of face of fluid of means of control of 4) fluid face divides pattern of free fluid range (average RPM system uses formula of free fluid face) with pattern of tie fluid range two kinds, if pursue,2 are shown. Pattern of free fluid range makes smooth from on to next illuminate, workpiece grows up. Because fluid face does not accept an obligation, plant of strickle of appropriative fluid face requires after a treatment is over, workpiece can get the influence of tension of fluid face face, make the liquid ply of perpendicular direction unfavorable control, drop the resolution of this direction thereby; And each are exposed in atmosphere, yi Jin enters dirt, also can drop resolution. Pattern of tie fluid range is workpiece limitation between substrate and smooth window, illuminate of from bottom to top of beam of light, workpiece grows downward (3 because excluded the effect of tension of fluid face face, those who be helpful for perpendicular resolution rise, agree with of small machine make. But an as not easy as smooth window departure shapes after also bringing every solidify so, and smooth window can draw the question such as one part light energy (of these problems solve will be in 2.

Of 2 tests system form reach debug " in demonstrative) . 2 small machine shape solely system 2.

1 light shapes the article is in machining complex to shape solely to small machine on the foundation that special technology issue studies, put forward to apply to the machining complex that small machine shapes solely, compare with current RPM system, if express 3 shown characteristics,this machining complex is had. 2.

2 tests system forms reach debug small machine to shape solely the design of experimental system is based on the following principle: Simplification of facility construction do one's best; Those who include laser inside is all shape equipment component all introduces a home made product, develop cost at reducing with benefit, initiate tiny small-sized light to shape the system is homebred the way that change. Small machine shapes solely the block diagram that experimental system forms is shown 3 times like the graph, graph 4 for photograph of experimental system panorama, graph 5 mix for system of laser, workbench, smooth route the part such as colophony chamfer. Experimental system of each component form, the function reachs norms to if the watch is shown 4 times,wait. Experimental system debugs basically solved following problems: (1) shapes a depart with smooth window adopt in smooth window surface method of besmear answer resinous, undertook sort of material of Tu Fu of smooth window surface and Tu Fu assign the test of type. Besmear answer material includes fluoride and silicon to change content to wait; Besmear compound type has colophony direct Tu Fu, with colophony adhesive plaster or film (a general designation is Tape) stickup etc. Besmear answer material should have the integral performance index such as transparency, separative, hear resistance, besmear compound type should go easily simply. Through comparative experiment, decided in smooth window surface stickup Teflon(gets together 4 fluorine ethylene) the optimum plan of Tape. This kind of stickup plan has integral performance good, colophony is stickup even, effect is good and use convenient wait for an advantage. (The contrast of stickup material is opposite 2) smooth window Japan is produced (3MScotckTM) and homebred (peaceful city factory of organic fluorine material) Teflon film had comparative test, reached homebred Tcflon film also can regard smooth window as the conclusion of stickup material. (Material of 3) smooth window and pervious to light the light that material of solid optometry window needs wavelengh to actinic reaction place is due tall transmissivity, pass the pervious to light and comparative test of pair of common glass and vycor, the decision chooses good to sex of ultraviolet light transmission vycor to make smooth window material. (The high frequency interference that analysis of 4) high frequency interference and interference rejection measure generate to laser of element of pulse type nitrogen undertook an analysis, the feature that diagnoses a this interference cause is: Interference frequency is amounted to nearly hundred, instantaneous amplitude is as high as 100 bend over. Took the corresponding the way to deal with a situation that shows as follows; Use the screen measure that has specific aim to keep apart, eliminate interference source; Will cut off the channel of the top of a kitchen range that reachs block up interference with reasonable ground connection method: Receive circuit in order to reduce line of setting filter, use screen to wait to the sensitivity of interference, obtained better interference rejection result. 2.

3 light shape craft experiment research alls alone through experimental model, mastered relatively reasonable small machine to shape solely craft dimensions, its reduce operates measure as follows: (1) is fiducial search leaving on substrate if dry basis follows opening,have those who search to be being used; Floating lifting platform (Z to workbench) make substrate smooth window of summary prep above, mobile exposure head, make the fiducial Kong Chong on its and substrate closes. (Treatment of 2) foundation ministry makes lifting platform stands by colophony chamfer smooth window as far as possible. All colophony solidify that makes substrate and smooth window aperture medium. Use large light exposure, the horizontal way size of fundamental ministry is more than size of way of treatment content standard, make fundamental ministry and substrate ask bigger interface is accumulated, assure to shape content can be secured firmly go up in substrate. Because absorb,to avoid smooth window finishing layer reachs colophony cross much quantity of heat and cause burn and metamorphism to wait destroy a phenomenon, make get together smooth lens drinks the focus leaves material fat, improvement comes loose hot condition restrains temperature rise thereby. Because fundamental ministry and area of smooth window contact are large, adhesion strength is great also, when both is detached easy cause smooth window finishing layer damaged. For this, fundamental ministry every solidify is certain area, make lifting platform rises, drop, the adhesion strength when making depart every time thereby has not been sent big. In process of fundamental ministry treatment, handlers should suspend status of treatment, certain treatment often, avoid workpiece and the accident that smooth window does not depart to happen. (Treatment of 3) appearance ministry is machined than fundamental ministry, use small exposure facula and small light exposure, in order to raise resolution. Make the exposure condition of workpiece interior is changed equably, , make 2 times when solidify be out of shape is pure likeness is out of shape only. Use means of exposure of improvement grating scanning, pulse, the scanner can move directly solidify unit position. The colophony between the workpiece when lifting platform drops and smooth window suffers extruding, the press press when rising, cause smooth window easily the injury of finishing layer or workpiece because this, rise begin to reach drop when stopping due a paragraph of amortize, need a few seconds about. (4) ultrasonic acetone is cleaned (5) ultraviolet light 2 times this experimental system already debugged solidify successful, undertook small test specimen shape try treatment, try treatment purpose to be: Whether can system of scanning of test and verify count scanning by set solidify unit (the) of fitness for use that includes BMP data form; The layer that affirms Z direction is thick; Test and verify shapes a dissociable sex with smooth window; Observe solidify condition, affirm have without not solidify colophony is placed in solidify layer; And shape of substance appearance neat the gender. The appearance of small test specimen is peace of pillar of columnar, elliptical column, triangle travel is hexahedral, face measure is 2, 3mm2 left and right sides. The result that tries treatment makes clear: Experimental system can move normally, x, Y plane scanning and Z all accord with design requirement to layer thick control, colophony solidify is even, shape can depart with smooth window well, shape appearance of substance outward appearance is neat. But this is the abecedarian tries treatment merely, appearance of small test specimen is still simple, the small part of more complex form, and the experimental job that uses small mechanical scale effect to make small machine directly is undertaking in. In addition, shape resolution and scanning resolution are not quite high still, investigate its reason, it is the design as a result of system of the choice in laser, smooth route, and the limitation that when the design of workbench makes those who wait for plan make, got develop funds. Current, we are beginning following works: Reduce stimulate dimension of facula of beam of light in order to obtain tall shaping resolution. Improve workbench precision to scan in order to rise resolution. The article discussed 3 conclusion to shape solely the possibility that the law uses at small machine to make. Shape to machine craft, construction of system to reach imperceptibly in the light to small machine debug and light shapes on the foundation of the research such as craft experiment, made the first small machine of domestic shape solely experimental system. Systematic place uses yuan of component to all be homebred, explored low cost tiny small-sized light shapes is the way that all makes. This experimental system already was passed " 863 plans " expert group is checked and accept. CNC Milling